Optical profilometers from leading manufacturer Zygo's NewView 9000 series are powerful next-generation interferometric systems with Zygo's patented Coherence Scanning Interferometer (Zygo CSI) technology. Zygo CSI combines the advantages of conventional CSI mode (also called White light vertical scanning interferometry) with Phase ShiftingInterferometry(PSI) to enable extremely accurate and fast measurements on a wide range of surfaces - from super smooth to very rough, from polished mirror surfaces to transparent (glass and plastic) to matte black hockey pucks.
By combining these methods, measurements can be made on transparent and non-transparent materials such as metals, glass, polymers, ceramics, as well as organic materials. For example, transparent multilayers, rough and highly polished reflective metal layers, and more can be measured without the need to select a measurement mode.
Key features
- Smart setup function for setup and measurement at the touch of a button
- Non-contact surface metrology without the need to modify the feature being measured
- Modular design
- High measurement speed (up to 171 µm/s)
- Sub-nanometer accuracy
- Wide choice of lenses
- Crash protection function to protect the lens against impact
- 3D interactive surface maps
- Flexible metrology analysis
- Comprehensive Zygo Mx data visualization and analysis software
