Manufactured surfaces can be of different shapes and sizes. For surfaces where shape characterization is critical, ZYGO's laser interferometers and 3D optical profilers excel at sub-nanometer repeatability of non-contact surface data. Incorporating industry standards for shape and flatness into the Mx™ analysis software creates a one-stop surface inspection tool. Discover with us the solution for your surface shape and flatness metrology applications.
Shape measurement
Shape metrology can be summarized as the absolute or relative measurement of a surface compared to a base shape. ZYGO products cover general applications such as spheres and cylinders for finished measurements using standard products, along with specialized applications and tools for more complex forms such as aspheres or thin glass.
The scope for ZYGO applications in shape metrology is equally wide and our tools are flexible. Bevel radii, prism angles or deviations between surfaces or surface curvature are just some examples. Cartesian and rotationally symmetric fitting functions accompany millions of data points across a given surface to ensure confidence in our shape metrology.
Flatness measurement
Flatness measurement is performed in a variety of ways across the ZYGO product line. High-quality transmission planes (up to λ/50) allow ZYGO laser interferometers to measure planes for space telescopes to brushed steel surfaces. The Mx™ software expands the application space of flatness metrology for oversized (greater than 4" to 6") rectangular surfaces through sliding incidence measurements.
Optical profilometers with motorized grading overcome small field-of-view measurements by using stitching and patterned movements to examine and plot surface flatness results. Similarly, the range of working distances of our microscopic objectives enables the measurement of flat saddles and seals in recessed cavities.
With a range of solutions and a robust application space, ZYGO prides itself on being a leader in surface shape and flatness measurement. Find out how ZYGO can meet your surface specifications while exceeding your expectations.
