The ZYGO Verifire Fizeau laser interferometer for measuring the shape perfection of optical elements or reflective surfaces of solid materials up to a circular diameter of 100 or 150 mm. The interferometer is equipped with the original QPSI measurement and statistical data processing technique to provide increased robustness against common mechanical vibrations in industrial environments, moving beyond conventional phase-shift interferometry.
QPSI
The PSI(Phase Shifting Interferometry) technique, controlled by mechanical displacement of the interferometer mirror, increases the accuracy of the interferometer measurement. The original refinement of this technique, called QPSI(Quick Phase-Shifting Interferometry), takes the resistance to common vibrations in industrial environments beyond conventional phase-shifting interferometry.
Key Features
- The light source for the measurement is a stabilized He-Ne laser (633 nm) with a radiation coherence length of up to 100 m
- Interference patterns are recorded by an integrated camera with a resolution of up to 11 MPx.
- Frame rates up to 210 Hz (depending on the camera)
- Comprehensive MetroPro MX software for statistical data processing and visualization
- The instrument is suitable for horizontal and vertical measurements
- Possibility of remote control of the interferometer to increase the comfort of measurement
- Resistance to mechanical vibrations
Verifire HD / HDX
The Zygo Verifire™ HD and HDX interferometers are variants of the Verifire™ interferometer equipped with a more advanced camera to capture the interference pattern. The high resolution of 11 MPx enables the detection of finer imperfections in the shape of optical elements, in the order of the so-called mid-spatial frequency.
