We distribute this product only in the Czech Republic and Slovakia.

VASE Ellipsometer

VASE® is a range of accurate, versatile and reliable spectroscopic ellipsometers from the American manufacturer J. A. Woollam for research on all types of materials. It is optimized for measurements in the Brewster angle region thanks to the combination of RAE and patented AutoRetarder technology. It can handle semiconductors, dielectrics, polymers, metals and multilayers.

In addition to its high measurement accuracy, it excels in its wide variability and spectral range - from 193 to 4000 nm.
The adjustable wavelength and angle of incidence allow flexible measurements in the following areas, among others:

  • Reflection and transmission ellipsometry
  • Generalized ellipsometry (Anisotropy, Retardance, Birefringence)
  • Intensity measurements: reflectance (R) and transmittance (T)
  • Cross-polarization (R/T)
  • Depolarization
  • Optical scatterometry
  • Mueller matrix

OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
What else we can help with

Application

Parameters

Maximum data accuracy:

The VASE is a variable angle spectroscopic ellipsometer with a rotary analyzer (RAE) and patented AutoRetarder® for unmatched data accuracy.

High precision wavelength selection:

Designed specifically for spectroscopic ellipsometry, the HS-190TM monochromator delivers automatic wavelength selection and spectral resolution controls in addition to improved speed, wavelength accuracy and light throughput.

Flexible measurement

VASE features a vertical sample holder that accommodates a wide range of measurement geometries including reflection, transmission and scattering.

Specifications

  • Vertical sample holder
  • Computer controlled goniometer angle of incidence (20° - 90°)
  • Monochromator with one or two chambers
  • Spectral range 250 - 2500 nm (single chamber monochrom.) to 193 - 4000 nm
  • AutoRetarder®: patented technology to guarantee the highest accuracy

Accessories

  • DUV from 193 nm
  • NIR up to 3200 or 4000 nm
  • Motorized and manual XY feeds and rotations
  • Measurement beam focusing
  • Camera for locating the beam trace on the sample
  • Cryostat (4.2 to 500 K or 4.2 to 800 K)
  • Liquid stage
  • Electrochemical cell
  • Temperature control (Linkam stage -70°C to +600°C)
  • and more (see manufacturer's website)

Dokumenty

VASE Datový list

Inquire product

Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

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