The most powerful excimer laser in Central Europe

Excimer laser assembly for modification of polymers and semiconductors, laser ablation, creation of periodic structures on surfaces to enhance biocompatibility or creation of structures on semiconductor surfaces, etc.

The customer also required the ability to damp the output energy of the pulse in the range of 1-100 %, i.e. to be able to apply 1 J or 10 mJ to the sample, which is not a common feature in such a powerful excimer laser model.

Primarily an industrial high-power excimer laser Coherent LEAP with dual attenuator for output power and pulse energy control. The output beam is guided through a covered periscope from the laser on the optical workbench to the sample using highly reflective coated mirrors.

Ultimately, the biggest challenge in the project was moving the laser, which itself weighs almost 900 kg and has a footprint of 2 x 1 m, plus it had to be moved to an above-ground floor.

Parameters of the equipment

• Wavelength 248 nm
• Pulse energy ≥1000 mJ @ 100Hz
• Max. achievable repetition rate 100 Hz
• Average power 100 W
• Energy stability < 1%
• Pulse length 36 ns
• Beam size 32 ±3.5 x 13 ±4 mm
• Beam divergence ≤4.5 x ≤1.5 mrad
• Water cooled
• Communication interfaces USB and Ethernet
• Integrated diagnostic system