AFSEM™ from GETec allows you to extend the capabilities of your scanning electron microscope (SEM) with the unique features of atomic force microscopy (AFM) with the ability to correlate data analysis.
Compatible with most available SEM and FIB/SEM systems on the market,AFSEM™ can easily extend the capabilities of your system to include atomic force microscopy as well. Due to the unique design, there is no unwanted interference with other measurement methods of the system (e.g. FIB, FEBID, EDX), on the contrary, the system with this extension can, among other things, obtain information about the 3D structure of the sample.
Features
- AFSEM™ scanner dimensions: 41 x 110 x 77 mm³ (HxWxD)
- AFSEM™ scanner weight: 500 g
- Scanning range: 35 x 35 µm² for x,y (closed loop); 5 µm for z-axis
- Vacuum compatibility: up to 10-7 mbar
- Different measuring modes