We distribute this product only in the Czech Republic and Slovakia.

AFSEM for correlative microscopy

AFSEM™ from GETec allows you to extend the capabilities of your scanning electron microscope (SEM) with the unique features of atomic force microscopy (AFM) with the ability to correlate data analysis.

Compatible with most available SEM and FIB/SEM systems on the market,AFSEM™ can easily extend the capabilities of your system to include atomic force microscopy as well. Due to the unique design, there is no unwanted interference with other measurement methods of the system (e.g. FIB, FEBID, EDX), on the contrary, the system with this extension can, among other things, obtain information about the 3D structure of the sample.

Features

  • AFSEM™ scanner dimensions: 41 x 110 x 77 mm³ (HxWxD)
  • AFSEM™ scanner weight: 500 g
  • Scanning range: 35 x 35 µm² for x,y (closed loop); 5 µm for z-axis
  • Vacuum compatibility: up to 10-7 mbar
  • Different measuring modes
Richard Schuster
Expert advisor

Ing. Richard Schuster

+420 601 123 593

schuster@optixs.cz

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OptiXs care

  • We will expertly consult your planned application
  • Our team is able to integrate the product into a larger system
  • We ensure fast delivery of spare parts and local service
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Application

Parameters

Designed primarily for integration into SEM,AFSEM offers a wide range of measurement modes typical of atomic force microscopy (AFM). It thus allows to easily extend an existing SEM microscope not only with the capabilities of an AFM microscope, but especially with the correlative analysis of data acquired by both methods simultaneously. For example, static and dynamic 3D imaging, phase contrast measurements, force modulation measurements, conductivity mapping, etc. are offered. Of course, measurements in both contact and AC mode are also possible.

AFSEM 1.0 AFSEM nano
Sensor dimensions [mm] 110 x 77 x 41 70 x 58 x 30
Scanning range [um] 34 x 34 (closed loop) 25 x 25 (closed loop)
XY-scanner noise < 0.3 nm (RMS) < 0.3 nm (RMS)
Scanning range in Z [um] 5 15
Z-scanner noise ~80 pm ~80 pm
XYZ displacement range [mm] 8 x 12 x 24 12 x 12 x 12
Minimum XYZ step [nm] 50 30
Sensor weight [g] 500 70
Vacuum compatibility [mbar] 10-6 10-7

Dokumenty

AFSEM Brožura

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Are you interested in product? Send us your requirements via the enquiry form or contact an expert consultant directly. We will be happy to answer your questions and propose a solution according to your needs.

Expert advisor

Richard Schuster

Ing. Richard Schuster

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