In September 2019, we designed, manufactured and delivered a LIBS spectroscopy setup for the J. Heyrovsky Institute of Physical Chemistry of the CAS. This was an extension of the existing setup (Nd:YAG laser, vacuum chamber, spectrograph) for laser-excited plasma spectroscopy with an optical path inside the vacuum chamber, with focusing optics for the laser, sample shift in XYZ axes and a view camera allowing precise focusing of the laser beam on the sample surface.
The programmable movement of the samples by means of the displacements also enables surface analysis and the generation of 2D maps (or, in combination with depth profiling, 3D maps) of the elemental distribution in the sample.
The assembly is equipped with an optical system for collecting the microplasma radiation and analyzing it with a spectrograph outside the sample chamber, as well as control electronics and software that allow programming of the automatic sample displacement.
Parameters of the device
- Automatic sample positioning with a range of 75 mm in all axes (resolution below 1 um), load capacity 2 kg
- Covered optical path, laser beam guidance to sample
- Motorised focal position control with 3 cm range (8 nm resolution)
- Motorised position control of optics for optical signal acquisition
- Assembly mounted on a breadboard with a network of M6 threads, easy to remove the entire experiment from the vacuum chamber and use the chamber for another experiment
- Preview camera for precise localization of the analyzed spot on the sample