Zygo Qualifire is equipped with the latest technology in laser interferometry. The system uses highly stable laser sources with long lifetime and minimal thermal drift. Thanks to the newly implemented dynamic measurement technology (QPSI), measurements can also be made on moving or vibrating components with high accuracy. The interferometer also incorporates advanced software tools for automatic measurement evaluation, allowing production defects to be quickly identified and analyzed to improve the overall quality of production processes.
Flying Spot - An innovative method of eliminating coherence artifacts provides a level of confidence not common in other noise reduction systems. By removing coherent spatial noise and annoying coherence artifacts from the cavity, Flying Spot provides the best signal-to-noise ratio for highly accurate measurements. The Flying Spot enabled Qualifire system combines the best of the patented Ring of Fire and Coherent Artifact Reduction System(CARS) technologies to create a single noise reduction solution.
Plano Cavity Autofocus - For the highest resolution instruments on the market (up to 11 MPx), precise focus on the surface under test is a must. The Flying Spot module enables a phase-based autofocus method. This means that very precise focus can be set on perfectly mirrored surfaces without the need for edges, fiducials, meshes or other physical artifacts necessary for manual or intensive focusing. In fact, precise focusing can be achieved without operator intervention.
Stable Zoom - A new, patented stable zoom method with no moving optics provides stable optical magnification with no shift in focal point or image centricity. This diffraction-limited zoom in the 1x to 3x magnification range also significantly improves the instrument transfer function (ITF), making it easier to quantify medium and high spatial frequency features. Since there is no shift in image focus or centering when the system magnification is changed, system error subtraction can be maintained at all magnifications without loss of data fidelity.
Smart Accessories - Using Zygo' s smart accessories enables smart setup features. The Smart Setup feature automatically adjusts lateral resolution and other instrument parameters based on automatic accessory detection, in the case of Smart Transmission Spheres the radius of curvature of the part. It then automatically adjusts the factory calibrated system error map and subtracts from the measured data, enabling the best metrology on the market with reduced setup time.
The hermetically sealed optical part of the interferometer makes the system significantly more resistant to environmental contaminants and facilitates possible service interventions such as laser source replacement.
Another new feature compared to the previous generation is theintegrated piezo-mounted receiver (PMR) for PSI and QPSI, which makes the system not only more compact but also more robust. In addition, the system design is optimized foreasier on-siteservice interventions, i.e. without the need to send the system to a service lab and without high demands on the cleanliness of the environment.
Qualifire™ represents the leading edge in the world of interferometric measurement systems. Its ability to provide fast, accurate and repeatable results while reducing overall measurement time and expertise requirements is what sets it apart from the rest and makes it ideal for a wide range of applications.
