The American manufacturer J.A.Woollam Co. has introduced a hot new development in the field of spectroscopic ellipsometers, dedicated to the rapid mapping of thin films. The new Theta-SE ellipsometer uses the latest Dual-Rotation technology to collect ellipsometric data and employs a unique, patented Dual-Theta stage for mapping.
This unique design allows for a very compact design of the entire instrument, which includes, among other things, focusing attachments, an assembly for fully automated and extremely fast sample alignment (motorized z, tip, tilt axes; camera, automatic image and tilt recognition) and a CCD detector for fast recording of the entire spectrum at once.
Dual-Rotation technology enables highly accurate ellipsometric measurements over a wide spectrum, with sample characterization capabilities based on SE, g-SE and MM-SE approaches.
The whole concept of this new ellipsometer is optimized for fast and precise mapping with focus on the sample surface, the novel approach to sample positioning combining two rotary tables for wafer translation is a clear example of this. Now you no longer have to wait long hours for accurate mapping of even large optical surfaces. The icing on the cake is the affordable price of the device including the advanced CompleteEASE analysis software.
